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发明名称
摘要
申请公布号
JPS6364047(U)
申请公布日期
1988.04.27
申请号
JP19860157157U
申请日期
1986.10.14
申请人
发明人
分类号
H01L21/52;H01L23/12;H01L23/34;H01L23/36;(IPC1-7):H01L23/12
主分类号
H01L21/52
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