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发明名称
FILTRATION SYSTEM
摘要
申请公布号
JPH09260345(A)
申请公布日期
1997.10.03
申请号
JP19960068266
申请日期
1996.03.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
MIYABE KAZUE;KIRIYAMA SHUJI
分类号
C23F1/08;C23F1/46;H01L21/304;H01L21/306;(IPC1-7):H01L21/306
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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