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发明名称
INSULATING FILM FLATTENING METHOD
摘要
申请公布号
JPH10163191(A)
申请公布日期
1998.06.19
申请号
JP19960336435
申请日期
1996.12.02
申请人
YAMAHA CORP
发明人
INOUE YUSHI
分类号
H01L21/302;H01L21/3065;H01L21/3105;H01L21/316;H01L21/768;(IPC1-7):H01L21/316;H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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