| 摘要 |
PROBLEM TO BE SOLVED: To reduce influence due to reflected light and improve the precision of alignment. SOLUTION: Four blockers 2a-(2d) which restrict an exposure region are slantingly arranged with respect to an optical axis of an alignment light L2. In this case, it is also possible that sectional shapes of the blockers 2a-(2d) are constituted as wedge shapes, and the surfaces and the backs are inclined with respect to the alignment light L2. The light reflected by the surfaces of the blockers 2a-(2d) out of an alignment light L1 irradiated from an alignment optical system 5 will not return to the alignment optical system 5. The light reflected by the backs of blockers 2a-(2d) out of the light reflected and returned from a mask 1 and a water 4 is also will not returned to the mask 1 and the water 4. As a result, multiple reflections between the mask 1 or the water 4 and the blockers 2a-(2d) can be prevented. |
