| 摘要 |
PROBLEM TO BE SOLVED: To obtain an inspection apparatus by which a defect such as irregularities or the like can be discriminated by a method wherein the inner surface of a hollow member is inspected on the basis of the image formation state of a reflected beam which is image-formed on a CCD camera. SOLUTION: For example, from a laser emission head 3, a semiconductor laser beam at a wavelength of 680 nm is emitted, and a parallel beam Bi which is collimated is incident on a glass rod lens 2 whose cutting angleθf is 45 deg. and whose refractive index Nr is 1.457. Inside the glass rod lens 2, the beam is propagated by keeping an angleθn of 15.97 deg., and a conical beam B0 at an angleθout of 23.63 deg. is radiated from the other end. Then, the conical beam B0 is shone at a conical mirror 1 at an angleθp of 56.8 deg. so as to be converted into a conical beam Bd , and the inner circumferential face 5a of a hollow member 5 is irradiated. In addition, the conical beam Bd is reflected there so as to be incident on a CCD camera 6, and it is image-formed in a prescribed position which is decided by the focus of the lens 2. Its image is converted into an electric signal, the image is shown on a monitor 8, and the inner circumferential face of the hollow member 5 is inspected on the basis of an image formation state inside an image discrimination device 7.
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