| 摘要 |
PURPOSE: A method for manufacturing a thin film actuated mirror array is to prevent an upper layer and a transformed layer from being damaged when removing a sacrificial layer. CONSTITUTION: A number of metal oxide transistor transistors are built in a driving substrate(510) in a form of matrix. A passivation layer(530) is formed on the driving substrate and a drain pad(520) formed on the driving substrate. An actuator includes a membrane(560) with one side contacted with a drain pad(520) of the passivation layer and an air gap(550) interposed between the other side and the passivation layer, a lower electrode(570) formed on the membrane, a transformed layer(580) formed on the lower electrode, an upper electrode(590) formed on the transformed layer, a scribe(600) formed by patterning a desired portion of the upper electrode, a wiring hole(610) vertically formed from one side of the transformed layer to the drain pad through the lower electrode, the membrane, the passivation layer, and a wiring member(620) for electrically connecting the lower electrode with the drain pad.
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