METHOD FOR MEASURING FLOW RATE, FLOW SENSOR, AND COMBINED FLOWMETER

摘要

PROBLEM TO BE SOLVED: To accurately measure fluid temperature for correcting measurements of flow rate. SOLUTION: Thin-film heaters 3, 4 are driven intermittently at predetermined time intervals to measure the flow rate of fluid, the outputs of the thin-film heaters 3, 4 being corrected in accordance with the output of a fluid temperature sensing element 5 when the thin-film heaters 3, 4 are not driven. Therefore, signals of the fluid temperature sensing element 5 can be sampled without being affected by the temperatures of the thin-film heaters 3, 4.