| 摘要 |
PURPOSE: A working robot arm for semiconductor producing provides to prevent a wafer from temperature difference by a heater CONSTITUTION: A working robot arm for semiconductor producing consists of a rotating disk(13), an arm supporting shaft(14), an arm(15), a wafer stand(16), and a heater(19). A silicon rubber heater is usually used for the heat(19). The rotating disk(13) is fixed on the rotating shaft(12) and the wafer stand(16) is equipped on the end of the arm(15). The air suction hole(17) is made to hold a wafer at the center of the wafer stand(16). The heater(19) is installed on the bottom side of the arm(15) to increase a temperature of the arm(15) and the temperature of the wafer stand(16) becomes identical with the temperature of a wafer before the wafer is moved. Therefore, Stress transferring and a damage of the wafer from the temperature difference is prevented.
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