发明名称 |
Position detecting method and unit, optical characteristic measuring method and unit, exposure apparatus, and device manufacturing method |
摘要 |
Correlation values between a plurality of templates prepared beforehand and a picture-element data distribution as a pick-up result of an image are calculated, and the position of a maximum template whose correlation value is the maximum of the calculated correlation values is obtained. Subsequently, a curved surface function is calculated which fits the distribution of calculated correlation-values in positions near the maximum template's position, and the position of the picked-up image is calculated based on the curved surface function. As a result, the number of templates prepared beforehand to achieve desired accuracy in detecting a position and the number of times of calculating correlation-values can be reduced, and the image position can be quickly and accurately detected.
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申请公布号 |
US6724464(B2) |
申请公布日期 |
2004.04.20 |
申请号 |
US20010025917 |
申请日期 |
2001.12.26 |
申请人 |
NIKON CORPORATION |
发明人 |
YANG JUPING;FUJII TORU;INOUE FUYUHIKO |
分类号 |
G01M11/02;G03F7/20;G03F9/00;G06T7/00;H01L21/027;(IPC1-7):G03B27/52;G03B27/42;G03B27/54 |
主分类号 |
G01M11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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