| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator structure and an optical device capable of compensating the displacement of an electrode due to a change in temperature. SOLUTION: An actuator structure 5 moves an electrode 7 relative to an electrode 8 by making an electrostatic force generated between the electrodes 7 and 8. The electrode 7 comprises a fixed part 10 fixed on the upper surface of a substrate, a connection part 11 supported by the fixed part 10, and a comb-shaped part 12 supported by the connection part 11. The electrode 8 has a fixed part 15 fixed on the upper surface of the substrate, and a comb-shaped part 17 connected to the fixed part 15 via a connection part 16. The comb-shaped part 17 faces the comb-shaped part 12. COPYRIGHT: (C)2005,JPO&NCIPI |
