| 摘要 |
An electret condenser 2 includes a fixed electrode 6 , a vibrating electrode 5 , an electretized silicon oxide film 7 formed between the electrodes, and silicon nitride films 8 and 9 formed so as to cover the silicon oxide film 7 . The silicon oxide film 7 covered with the silicon nitride films 8 and 9 is formed on the vibrating electrode 5.
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