| 摘要 |
The invention concerns a device for vacuum pumping comprising at least one main pump (1) and one auxiliary pump (2) connected in series, respectively driven by a first electric motor (1b) and a second electric motor (2b) themselves powered by respective power supplies (1c, 2c) monitored by a processor and a programme recorded in a memory (3b). The programme recorded in the memory (3b) generates a speed variation law (A) of the main pump (1) which decreases regularly, and a speed variation law (B) of the auxiliary pump (2) which increases regularly, so as to reduce energy consumption while maximizing pumping speed. ® KIPO & WIPO 2008 |
