Stage system and a lithographic apparatus

摘要

A movable stage system is configured to support an object. The stage system comprises an object table configured to support the object and an object table support defining an object table support surface configured to support the object table. The object table support comprises at least one first actuator to drive the object table support in a first driving direction substantially parallel to the object table support surface. In a projection on a plane parallel to the object table support surface the at least one actuator is spaced with respect to the object table in a direction perpendicular to the first driving direction such that the risk on slip between the object table support and the object table supported thereon is decreased.

主权项

1. A movable stage system, comprising:
an object table configured to support an object; and an object table support defining an object table support surface configured to support the object table, wherein the object table support comprises a first actuator and a second actuator configured to drive the object table support in a first driving direction substantially parallel to the object table support surface, and wherein the object table support comprises a third actuator and a fourth actuator configured to drive the object table support in a second driving direction substantially parallel to the object table support surface and substantially perpendicular to the first driving direction, wherein the first actuator and the second actuator are spaced from each other in a direction parallel to the first driving direction, and wherein the third actuator and the fourth actuator are spaced from each other in a direction parallel to the second driving direction, and wherein, in a projection on a plane parallel to the object table support surface, the first actuator and the second actuator are spaced apart from each other in a direction perpendicular to the first driving direction and at a distance greater than a width of the object table, and wherein, in a projection on a plane parallel to the object table support surface, the third actuator and the fourth actuator are spaced apart from each other in a direction perpendicular to the second driving direction and at a distance greater than the width of the object table.