METHOD FOR MANUFACTURING ORGANIC DEPOSITION FILM, AND ORGANIC ELECTROLUMINESCENCE DEVICE

摘要

[Problem] To provide a method for manufacturing an organic vapor deposition film whereby the amounts of organic vapor deposition materials deposited on a substrate can be precisely controlled. [Solution] The present invention has: a preparation step for preparing a vapor deposition film manufacturing device 1 having a chamber 2 inside which a vacuum state is maintained, n vapor deposition sources 3 including organic vapor deposition materials 31 to be emitted into the chamber 2, and n emission rate sensors 4 for measuring the emission rate of the organic vapor deposition materials 31 corresponding to the n vapor deposition sources 3; a pre-step for calculating the mix ratio of each organic vapor deposition material 31 with respect to each emission rate sensor 4 using the vapor deposition film manufacturing device 1; and a vapor deposition step for emitting all of the organic vapor deposition materials 31 simultaneously into the chamber 2 and thereby forming an organic vapor deposition film on the surface of a substrate 5 introduced into the chamber 2.