发明名称 |
MINIMAL CONTACT END-EFFECTORS FOR HANDLING MICROELECTRONIC DEVICES |
摘要 |
A minimal contact end-effector is described that may be used for handling microelectronic and similar types of devices. In one example the end-effector has a vacuum pad to generate a lifting force and a standoff fastened to the vacuum pad. The standoff has a plurality of legs with chamfered edges to contact the edges of a microelectronic device to hold the device against the lifting force. |
申请公布号 |
WO2016114977(A1) |
申请公布日期 |
2016.07.21 |
申请号 |
WO2016US12524 |
申请日期 |
2016.01.07 |
申请人 |
INTEL CORPORATION |
发明人 |
CHAVEZ_CLEMENTE, DANIEL;BAWDEN, ADAM J.;ZIADEH, BASSSM M. |
分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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