发明名称 MINIMAL CONTACT END-EFFECTORS FOR HANDLING MICROELECTRONIC DEVICES
摘要 A minimal contact end-effector is described that may be used for handling microelectronic and similar types of devices. In one example the end-effector has a vacuum pad to generate a lifting force and a standoff fastened to the vacuum pad. The standoff has a plurality of legs with chamfered edges to contact the edges of a microelectronic device to hold the device against the lifting force.
申请公布号 WO2016114977(A1) 申请公布日期 2016.07.21
申请号 WO2016US12524 申请日期 2016.01.07
申请人 INTEL CORPORATION 发明人 CHAVEZ_CLEMENTE, DANIEL;BAWDEN, ADAM J.;ZIADEH, BASSSM M.
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
主权项
地址