| 摘要 |
PURPOSE:To decrease the window width of the measuring energy and to reduce the spectrum profile change due to the variation of measurement points to the minimum. CONSTITUTION:When electron rays are emitted from an electron gun Ge, Auger electrons having the information inherent to a sample are generated from the surface of the sample S, pass through the first slit A', second slit A'', and an annular slit A, and are detected by an electron multiplier EM. If modulation is applied to the voltage of an AC power supply 4b by varying the voltage of a DC powe supply 4a, the blocking potential grid C2 of an inner cylinder 2 is affected, and the pass energy Epass can be made constant in conjunction with the action of a ground grid G1, thus the window width can be made constant. The signal Sd from a computer 7 is fed to a smaple position automatic moving mechanism D through the I/O interface 8, and the moving mechanism D is operated so that the electron rays hit the optimum position on the sample S corresponding to the measuring energy, thereby the spectrum profile change due to the variation of measurement points can be reduced to the minimum. |
