IN-LINE TYPE FILM FORMING DEVICE,申请号JP19870163914-传众专利搜索

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发明名称	IN-LINE TYPE FILM FORMING DEVICE
摘要
申请公布号	JPS6411973(A)	申请公布日期	1989.01.17
申请号	JP19870163914	申请日期	1987.07.02
申请人	ULVAC CORP	发明人	SUWA HIDENORI
分类号	C23C14/56;H01L21/203;(IPC1-7):C23C14/56	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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