发明名称 Handling apparatus
摘要 A handling apparatus comprises a holding member for holding an object to be handled, a driving member for driving the holding member, a locus detection section provided in a fixed position which is not driven by the driving member, the locus detection section representing a locus along which the holding member is to move, and a sensor, provided on said holding member, for detecting the locus. The locus of the holding member is constantly detected by the sensor during the operation of the holding member, and, when the holding member is displaced from a predetermined locus, the operation of the handling apparatus is suddenly stopped. Then, the holding member is moved to a position where the locus detection section can be detected by the sensor, and the holding member is restored to an initial position.
申请公布号 US5017082(A) 申请公布日期 1991.05.21
申请号 US19900560287 申请日期 1990.07.30
申请人 TOKYO ELECTRON LIMITED 发明人 KOBAYASHI, ISAO
分类号 B65G1/04 主分类号 B65G1/04
代理机构 代理人
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