发明名称 MODULARES KANALSYSTEM ZUM VERTEILEN VON MEDIEN
摘要 <p>A manifold system for enabling a distribution of fluids includes a plurality of individual manifold blocks that can be joined together to form a gas stick. Each manifold block will have a fluid passage way with an entrance port and exit port accessing a common surface. An active component can be mounted to one manifold block, while extending across a port of an adjacent manifold block. An alignment system can be provided to ensure that the entrance and exit ports are positioned in a plane containing the common surface to facilitate sealing.</p>
申请公布号 AT266166(T) 申请公布日期 2004.05.15
申请号 AT19990933722T 申请日期 1999.07.07
申请人 CELERITY GROUP, INC. 发明人 VU, KIM, N.;REDEMANN, ERIC, J.;SHERIFF, DAVID, P.
分类号 C23C16/44;F16K11/22;F16K27/00;F16L39/00;H01J37/32;H01L21/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):F16K27/00 主分类号 C23C16/44
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