| 摘要 |
PURPOSE:To provide for a method for forming a fine conductor pattern which is highly reliable and is several hundreds Angstrom wide. CONSTITUTION:Electron rays 2 are emitted on a surface of a metal oxide substrate 5 within a high-vacuum chamber 1 and a metal oxide at the emitted portion is reduced, thus forming a desired conductor pattern 10 on a surface of the metal oxide substrate 5. |
