| 摘要 |
A first surface of an elastic plate (32) is bonded onto one surface of a channel forming substrate (30). A first face of a supporting base (13) formed with a through hole therein is bonded onto a second surface of the elastic plate (32) which is opposite to the first surface. A first face of a resin casing (17) formed with an accommodation space therein is bonded onto a second face of the supporting base (13) which is opposite to the first face of the supporting base (13). At least one vibrator unit (12) including a fixation base (15), and piezoelectric vibrators (21) arranged on a first face of the fixation base (15) such that first ends of the piezoelectric vibrators are fixed thereon and opposite free ends overhang a second face (15a) of the fixation base (15). The vibrator unit (12) is accommodated in the casing (17) such that the piezoelectric vibrators (21) extend through the through hole of the supporting base (13) and the free ends thereof abut against the second surface of the elastic plate (32), and such that the second face (15a) of the fixation base (15) is bonded onto the second face of the supporting base (13). <IMAGE> |
