发明名称 |
Electrostatic chuck and plasma apparatus equipped therewith |
摘要 |
An electrostatic chuck having an electrostatic holding member arranged on an upper surface of the chuck main body for holding a semiconductor device during a plasma etching process. The electrostatic holding member includes a pair of insulating polyimide members and a conductive member interposed between the polyimide members. In operation, a voltage is applied to the first conductive member in order to generate static electricity to be applied to the electrostatic holding member for holding the semiconductor device.
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申请公布号 |
US5255153(A) |
申请公布日期 |
1993.10.19 |
申请号 |
US19910731478 |
申请日期 |
1991.07.17 |
申请人 |
TOKYO ELECTRON LIMITED;KABUSHIKI KAISHA TOSHIBA |
发明人 |
NOZAWA, TOSHIHISA;ARAMI, JUNICHI;HASEGAWA, ISAHIRO;OKUMURA, KATSUYA |
分类号 |
H01L21/683;H02N13/00;(IPC1-7):H02N13/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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