| 摘要 |
<p>PURPOSE:To keep the uniformity of a temperature and an atmosphere by a low-cost constitution and to make an apparatus small-sized in a vertical-type heat treatment furnace composed of a plurality of furnaces suitable for a large- sized substrate. CONSTITUTION:In a vertical-type heat treatment furnace composed of a plurality of frunace bodies, temperature sensors 14, 15, 27, heater controllers 17, 26 and a changeover device 16 for the temperature sensors are installed, and the temperature of the furnace bodies is controlled so as to interlock with the movement of a substrate 10 by the instruction of a central controller 18. In addition, the detection means of a gas supply amount and an exhaust amount is installed and controlled by the instruction of the central controller 18 in the same manner.</p> |
