PRODUCTION OF LIQUID CRYSTAL DISPLAY DEVICE

摘要

PURPOSE: To form the pattern of alignment marks with high accuracy in a thin layer for a black matrix by using an org. material. CONSTITUTION: This production method includes at least the following processes. (a) A negative-type photosensitive resist thin layer consisting essentially of an org. material to which a light-absorbing material is mixed is formed on a substrate. (b) The photosensitive resist thin layer in a specified part out of the effective area is removed by laser ablation method to leave an alignment mark part. (c). The photosensitive resist thin layer is exposed by using an exposure mask having an opening corresponding to the black matrix pattern and the alignment mark part. (d) The photosensitive resist is developed to form alignment marks and a black matrix. (e) The resist is baked to harden the alignment marks and the black matrix. (f) Plural color filters are formed.