| 摘要 |
PROBLEM TO BE SOLVED: To improve the positioning precision of a moving unit, simplify the mechanism, reduce the size of the mechanism and, further, enable application under an environment in which magnetization must be avoided. SOLUTION: A stage utilizing an ultrasonic motor has a movable moving unit 1, a 1st vibrator 2 which is brought into contact with the moving unit 1 and applies friction in one direction to the moving unit 1 by a combined vibration obtained by combining an expansion/contraction vibration and a bending vibration and a 2nd vibrator 3 which is brought into contact with the moving unit 1 and applies friction in the other direction to the moving unit 1 by a combined vibration obtained by combining an expansion/contraction vibration and a bending vibration. The moving unit 1 can be movable in a plane consisting of the one direction and the other direction in accordance with the friction applied by at leas one of the 1st vibrator 2 and the 2nd vibrator 3. |
