摘要 |
PROBLEM TO BE SOLVED: To obtain a capacitance-type pressure sensor which is smaller than that in conventional cases, in which a working man-hour is small and which is low-cost. SOLUTION: A sensor circuit element 20 is arranged on a glass substrate 12 which constitutes a pressure detecting element 13. Respective electrode terminals of the pressure detecting element 13 and a plurality of electrode pads on one side of the sensor circuit element 20 are electrically connected directly. A plurality of electrode pads on the other side of the sensor circuit element 20 and a circuit board 22 are electrically connected by bonding wires. On the other hand, the sensor circuit element 20 is coated with a resin. The pressure detecting element 13 in which the sensor circuit element 20 is arranged is fixed to the circuit board 22 by an elastic adhesive 23. Thereby, this capacitance-type pressure sensor is formed. |