发明名称 CAPACITANCE-TYPE PRESSURE SENSOR
摘要 PROBLEM TO BE SOLVED: To obtain a capacitance-type pressure sensor which is smaller than that in conventional cases, in which a working man-hour is small and which is low-cost. SOLUTION: A sensor circuit element 20 is arranged on a glass substrate 12 which constitutes a pressure detecting element 13. Respective electrode terminals of the pressure detecting element 13 and a plurality of electrode pads on one side of the sensor circuit element 20 are electrically connected directly. A plurality of electrode pads on the other side of the sensor circuit element 20 and a circuit board 22 are electrically connected by bonding wires. On the other hand, the sensor circuit element 20 is coated with a resin. The pressure detecting element 13 in which the sensor circuit element 20 is arranged is fixed to the circuit board 22 by an elastic adhesive 23. Thereby, this capacitance-type pressure sensor is formed.
申请公布号 JP2000283870(A) 申请公布日期 2000.10.13
申请号 JP19990087346 申请日期 1999.03.30
申请人 TOKIN CORP 发明人 SATO MASAHIRO
分类号 H01L25/16;G01L9/12 主分类号 H01L25/16
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