| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm pump capable of stably supplying a small quantity of fluid. SOLUTION: This diaphragm pump is provided with driving elements 13a, 13b on a body 12 of a driving body 9 with 180 degrees interval in a circumference direction. A pump chamber 49a is formed by a first diaphragm part 19a attached to the driving element 13a and an assist pump chamber 49b is formed by a second diaphragm part 19b attached to the driving element 13b respectively in the diaphragm pump. The cross section area of the second diaphragm part 19b is smaller than the cross section area of the first diaphragm part 19a, and the assist pump chamber 49b is communicated to a valve chamber 48 via a communication hole 30a. Air in the pump chamber 49a passes through a delivery side valve hole 34 and the valve chamber 48 and part of the air flows in the assist pump chamber 49b from the communication hole 30a. COPYRIGHT: (C)2005,JPO&NCIPI
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