| 摘要 |
A method and a system for reducing spreading earthquake damages in a semiconductor manufacturing apparatus are provided to prevent the collapse of a boat and to restrain earthquake damages by using an initial slight shock detecting unit and a controller for performing a boat collapse preventing process. A semiconductor manufacturing apparatus includes a heat treatment furnace(5) having a furnace entrance, a cover body for opening and closing the furnace entrance, and a boat(4) being mounted on the cover body. Work pieces are mounted on the boat in the form of a multistage. A receiving unit receives emergency earthquake information based on an initial slight shock. The emergency earthquake information is transmitted through a communication line. An initial slight shock detecting unit directly detects the initial slight shock. A controller(29) performs a first process for stopping the running of the semiconductor manufacturing apparatus based on the emergency earthquake information and the detected initial slight shock, and a second process for maintaining and supporting the boat in a contact or non-contact method to prevent the collapse of the boat.
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