| 摘要 |
Fine conductor lines (those having a width of <=50 muM) are disposed on a flexible metal oxide containing substrate by masking portions of the substrate, and then surface metallizing unmasked portions of the substrate. Polymeric preceramic films are preferred, especially those having a glass temperature of at least 300° C. and those of the PZT family, or those containing BeO. All suitable reducing gasses are contemplated, including especially H2. All suitable masking materials are similarly contemplated, including especially titanium, titanium nitride, tungsten nitride, tantalum, and tantalum nitride. In especially preferred embodiments the conductor lines have a width of <=25 muM, <=15 muM, <=5 muM, and even <=1 muM. The lines can advantageously compose a circuit that is coupled to a piezoelectric or other mechanical actuator, which in turn can be fluidly coupled to a fluid reservoir.
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