VAPOR PHASE EPITAXIAL GROWTH PROCESS,申请号JP19840152264-传众专利搜索

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发明名称	VAPOR PHASE EPITAXIAL GROWTH PROCESS
摘要
申请公布号	JPS6131386(A)	申请公布日期	1986.02.13
申请号	JP19840152264	申请日期	1984.07.23
申请人	NEC CORP	发明人	KITAJIMA HIROSHI
分类号	C30B25/18;C30B19/00;H01L21/208	主分类号	C30B25/18
代理机构		代理人
主权项
地址

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