| 摘要 |
PURPOSE:To execute aging and a test by one device, by using in common a pattern generating part for a logic operation by a dynamic aging device and an LSI tester, and providing plural pieces of test heads. CONSTITUTION:With respect to a control part 110 having functions for executing the test of a logic operation or generating a pattern for executing the logic operation and executing the aging, and controlling an aging temperature against a constant temperature oven, two pieces of drive heads 111a, 111b are provided so that they are alternately connected to the control part 110. The test heads 111a and 111b are exclusive, and 111b executes the operation test of an LSI, and 111a supplies an operation pattern in the course of aging to an LSI 108a which is stored in a constant temperature oven 113. In this way, both the dynamic aging device of an LSI and the LSI tester can be provided on one set of inexpensive device.
|
