| 摘要 |
PURPOSE:To realize a optical head of a waveguide type having high light transmission efficiency and high light condensability and a process for production of such head. CONSTITUTION:A part of the constitution of this optical head consists, as shown in sectional view, a transparent substrate 1 consisting of quartz, a level difference layer 9 formed of a nichrome metal layer, a buffer layer 10 consisting of silicon oxide, an optical waveguide layer 2 consisting of silicon nitride, a loading layer 14 consisting of alumina, a concentrical grating coupler 3A and a concentrical light condensing grating coupler 3B formed by etching the loading layer 14. The concentrical grating coupler 3A for inputting the laser beam from a laser beam source and the concentrical light condensing grating coupler 3B for radiating the light to the outside of the optical waveguide layer and condensing the light to the point outside the optical waveguide layer are composed of respectively separate film materials. Independent optimization of radiation loss coeffts. in the respective regions is possible. |
