| 摘要 |
PURPOSE:To provide an ion beam irradiation device capable of remarkably easily adjusting a position of a specimen for irradiating an ion beam on the position to be required on the specimen. CONSTITUTION:A beam 6a supplied from a light emitting module 20 through an optical fiber 2a is branched to two beams 6b, 6c by an optical demultiplexer 5, and the branched beams 6b is converted to electric energy 8a by a photoelectric conversion means 7 and supplied to a modulation control means 10 and an optical modulation means 11 as driving power. A modulation control signal 8c is outputted to the optical modulation means 11 based on an electric signal 8b inputted from a modulation signal input terminal 9b by the modulation control means 10, and the beam 6c branched by the optical demultiplexer 5 is light modulated with the modulation control signal 8c by the optical modulation means 11 is outputted as an optical signal 6d. The outputted optical signal 6d is transmitted from an optical output part 3b to the outside through an optical fiber 2b. |
