| 摘要 |
PURPOSE:To provide a semiconductor acceleration sensor in which fluctuation in the output temperature characteristics is prevented by eliminating the influence of thermal stress caused by the difference of thermal expansion coefficient between a base material and a base block, and a cantilever beam is protected against the excessive impact, load in the detecting direction of acceleration while reducing the number of components and assembling steps, the assembling time and the cost. CONSTITUTION:An arm 11 is set on a base block 3 and a cantilever beam 4, fixed with a strain gauge 6 and a weight 5 at the positions opposite to the base block 3, is fixed to the arm 11. The weight bonded to the tip of the cantilever beam 4 has trapezoidal shape while the base block has L-shaped cross-section so that the displacement of the weight can be controlled by the gap between the base block and the weight and the gap between the arm 11 and the weight. The base block and the weight are made of same material. |
