TOUCHING TYPE THERMO-CHUCK AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a thermochuck which periodically repeats a speedy heating/ cooling function in a photograph etching process. SOLUTION: Contamination at the back of a wafer can be prevented by using a polytetrafluoroethylene coating film which is superior in thermal resistance and in the adhesion of the wafer with an anodic oxide film 35 as a means 37 for preventing the flaking of the anodic oxide film 35, which is brought into contact with the wafer.