| 摘要 |
<p>PROBLEM TO BE SOLVED: To supply an electric connector enabling operation at a high temperature for a conductive layer in an electrostatic chuck 3 from a DC power source by providing one polyimide-providing film operating as a dielectric layer in the electrostatic chuck and permitting the polyimide providing film to have a specified durable operation temperature. SOLUTION: An upper second polyimide providing film 114 operating as the dielectric layer, the inner conductive layer 122 having a patterning and a lower first polyimide providing film 124 are provided in an electrostatic chuck means 112. The first and second polyimide providing films 124 and 114 are provided with a withstanding operation temperature of 175 deg.C, and conductive extension parts 116 are provided for the opening part 111 in a supporting platen 110 by positioning pins 120, so as to arrange them. Then, the positions on the supporting platen 110 are given relatively. Thus, the lower polyimide providing film 124 is adhered to the supporting platen 110. Consequently, the electric connector which realizes operation at a high temperature can be supplied into the electrostatic chuck 112.</p> |
