| 摘要 |
<p>An inventive array of M x N thin film actuated mirrors includes an active matrix and an array of M x N actuating structures. Each of the actuating structures includes a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode, an elastic member, a conduit and an insulating member. In the array, the insulating member is made of an insulating material, e.g., oxide or nitride, and is formed between top of the conduit and bottom of the first thin film electrode, thereby reducing the possibility of an electrical contact forming between the first and the second thin film electrodes. <IMAGE></p> |
