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发明名称
LIQUID METAL ION SOURCE
摘要
申请公布号
JPH1092362(A)
申请公布日期
1998.04.10
申请号
JP19960241572
申请日期
1996.09.12
申请人
HITACHI LTD
发明人
HIROSE HIROSHI;KAGA HIROYASU;FURUKAWA TAKAYASU;HIKICHI KAZUTO
分类号
H01J27/26;H01J37/08;(IPC1-7):H01J37/08
主分类号
H01J27/26
代理机构
代理人
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