| 摘要 |
PROBLEM TO BE SOLVED: To precisely overlap upper/lower liquid crystal display cell substrates at short time by correcting and controlling the table transportation positions of an upper substrate robot or a lower substrate robot by the dislocation amount of upper/lower transparent substrates. SOLUTION: Upper/lower substrates are transported to upper/lower tables and a Z-axis driving part raises the lower table and moves it to an alignment processing position (S1-3). The alignment marks of the upper/lower substrates are detected and positions are obtained. The dislocation amount of the upper/ lower substrates is calculated from a mark position coordinate (S4-6). The dislocation amount is judged to be within a specification value or not. At the time of NG, the lower table is moved and corrected. The dislocation amount of the upper/lower substrates is calculated again and the dislocation amount is judged until they are within the specification value (S4-7 and 8b). When they become within the specification value, an overlap processing is executed (S8a). The Z-axis driving part is lowered after the upper/lower substrates are fixed (S9). The dislocation amount when the substrate is transported is transferred to an upper substrate robot controller and a transportation position is corrected after assembly is terminated and a robot is discharged (S10 and 11).
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