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发明名称
METHOD AND SYSTEM FOR MEASURING POLYCRYSTALLINE CHUNK SIZE AND DISTRIBUTION IN THE CHARGE OF A CZOCHRALSKI PROCESS
摘要
申请公布号
EP1131477(A1)
申请公布日期
2001.09.12
申请号
EP19990971475
申请日期
1999.10.22
申请人
MEMC ELECTRONIC MATERIALS, INC.
发明人
HOLDER, JOHN, D.;JOSLIN, STEVEN, M.;SREEDHARAMURTHY, HARIPRASAD;LHAMON, JOHN
分类号
C30B15/02;C30B29/06;G01N15/02;(IPC1-7):C30B15/02;B07C5/10
主分类号
C30B15/02
代理机构
代理人
主权项
地址
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