| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately evaluate a sample by making intensity of plural beams constant. SOLUTION: This evaluating device is provided with an electron gun 1 for emitting a primary electron beam, a condenser lens 2 for forming a crossover by focusing the emitted primary electron beam, a first multiopening plate 3 arranged between the condenser lens and a crossover image forming point 4, and having plural openings 20 for separating the primary electrorn beam into the plural beams, image forming optical systems 5 and 7 for reducibly forming images of the plural beams on a wafer 8, a deflector 19 for deflecting the plural beams so as to scan respective irradiation spots of the plural beams whose images are formed on the wafer, multidetectors 12 and 60 for respectively detecting intensity of plural secondary electron beams emitted from the respective irradiation spots, and a control part 16 for evaluating the wafer 8 on the basis of images of the detected secondary electron beams. The first mutiopening plate is stepped so that the intensity of the plural beams mutually becomes equal, and a distance from the optical axis becomes close to the crossover image forming point as becoming a large opening. |
