发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide the manufacturing method of a semiconductor device capable of improving the reliability of connection by a bump through a more sure and simple means. <P>SOLUTION: The semiconductor device is manufactured by a method wherein the bump is equipped on a substrate, an adhesive film having an elasticity (-55&deg;C) of 100MPa-5GPa and a thickness of 5-40% of the height of the bump is applied on the bump to cover the same, and the adhesive film is equipped on the substrate so that the bump projects the film. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004200394(A) 申请公布日期 2004.07.15
申请号 JP20020366910 申请日期 2002.12.18
申请人 NITTO DENKO CORP 发明人 MATSUMURA AKIKO;HOTTA YUJI
分类号 H01L21/60;H01L21/48;H01L23/498;H05K3/34 主分类号 H01L21/60
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