| 摘要 |
A matching apparatus of semiconductor manufacturing equipment is provided to prevent the generation of accidents in a predetermined process by detecting previously the variation of main parameters and thickness using a specific resistance measuring unit capable of checking the variation of impedance according to the magnitude of specific resistance of cooling water. A matching apparatus of semiconductor manufacturing equipment includes a matching box, a cooling water line and a specific resistance measuring unit. The matching box(130) includes a matching circuit capable of matching an output impedance of a plasma generating unit with an input impedance of a chamber rod. The cooling water line(150) is installed in the matching box. The cooling water line is capable of controlling the temperature of the matching box by supplying cooling water from a cooling water supply source and circulating the cooling water. The specific resistance measuring unit(140) is installed on the cooling water line to measure the specific resistance of the cooling water.
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