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发明名称
WATER AND METHOD FOR STORING SILICON WAFER
摘要
申请公布号
EP1298715(A4)
申请公布日期
2008.03.19
申请号
EP20020703960
申请日期
2002.03.11
申请人
SHIN-ETSU HANDOTAI CO., LTD
发明人
ABE, TATSUO;KANAZAWA, KENICHI;MIYASHITA, AKIRA;KASHIMURA, NORIO
分类号
H01L21/304;H01L21/00;H01L21/02;H01L21/302;H01L21/306;H01L21/461
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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