METHOD AND APPARATUS FOR SORTING PARTICLES WITH A MEMS DEVICE
摘要
A micromechanical particle sorting chip uses laser light directed through at least one of a reflective and refractive surface to come to a focus in an optically transparent layer. The laser light impinges on a particle of interest, causing it to fluoresce. Upon detecting the fluorescence, a micromemchanical actuator is activated, which directs the particle of interest into one of a plurality of possible exit paths.
申请公布号
EP1910800(A2)
申请公布日期
2008.04.16
申请号
EP20060800528
申请日期
2006.07.31
申请人
INNOVATIVE MICRO TECHNOLOGY;FOSTER, JOHN S.;HARLEY, JOHN C.;HOVEY, STEVEN H.;MARTIN, RICHARD T.;NGUYEN, HUNG D.;RUBEL, PAUL JOHN
发明人
FOSTER, JOHN S.;HARLEY, JOHN C.;HOVEY, STEVEN H.;MARTIN, RICHARD T.;NGUYEN, HUNG;RUBEL, PAUL J.