Method for depositing film

摘要

The method for depositing a film of the present invention comprises the first irradiation step of irradiating particles having energy on a surface of a substrate 101, the first film deposition step of depositing a first film 103 on the surface of the substrate 101 subjected to the first irradiation step by using a dry process, and the second film deposition step of depositing a second film 105 having oil repellency on a surface of the first film 103. According to the present invention, a method for depositing a film enabling production of an oil-repellent substrate comprising an oil-repellent film having abrasion resistance of a practically sufficient level can be provided.

主权项

1. A method for preparing an abrasion resistance oil-repellant film on a substrate comprising:
irradiating an ion beam as a first irradiation roughening step on a surface of a substrate to form predetermined surface roughness on the surface of the substrate so that the surface roughness of a center line average height (Ra): 0.1-1000 nm, a 10-point average height (Rz): 5-2000 nm and a maximum valley depth (Pv): 15-2000 nm is transferred to a surface of a first film to be deposited on the substrate and depositing the first film on the surface of the substrate by a dry ion-assisted deposition method wherein the ion beam is continually irradiated between the roughening step and this depositing step; and depositing a second film having oil repellency on the roughened surface by vacuum vapor deposition to form the abrasion resistance oil-repellent film on the substrate.