Imprinting method

摘要

An imprinting method is capable of separating a molding material and a target material rapidly in pattern formation. The imprinting method includes a transferring process for transferring an inverted pattern of a mold 10 having a desired pattern formed thereon to a resist 30 by pressing the mold 10 against the resist 30; a curing process for curing the resist 30 by heating or irradiating light; and a separating process for separating the mold 10 from the resist 30 after the resist 30 is cured through the transferring process. The separating process includes a pulling process for pulling the mold 10 away from the resist 30 in a direction opposite to a direction in which the resist 30 is pressed; and a pushing process for pushing the resist 30 in the same direction as a direction in which the mold 10 presses the resist 30.

主权项

1. An imprinting method comprising:
a pressing process for pressing a molding material having thereon a pattern against a target material to be molded to form an inverted pattern of the molding material on the target material; a transferring process for transferring the inverted pattern of the molding material to the target material by curing the target material by heating or irradiating light; and a separating process for separating the molding material from the target material after the target material is cured through the transferring process, wherein the separating process includes: a pulling process for pulling the molding material away from the target material in a direction opposite to a direction in which the target material is pressed; and a pushing process for pushing the target material in the same direction as a direction in which the molding material presses the target material, and wherein the pressing process is performed in an atmosphere of a gas that is condensed under a temperature and a pressure obtained when the target material fills in a recess of the molding material.