Method of megasonic cleaning of an object

摘要

A megasonic cleaning method and a megasonic cleaning apparatus are provided. Microcavitation bubbles may be formed by applying an electromotive force to a cleaning solution using a megasonic energy in a separate room from an object to be cleaned. The microcavitation bubbles having a stable oscillation among the formed microcavitation bubbles may be moved to the object to be cleaned. A surface of the object to be cleaned may be cleaned using the microcavitation bubbles having the stable oscillation. Particles attached onto the surface of the object to be cleaned may be effectively removed while preventing pattern damage.

主权项

1. An apparatus for megasonic cleaning, comprising:
a bubble generating part configured to generate microcavitation bubbles in a cleaning solution by applying an electromotive force to a cleaning solution using a megasonic energy, the microcavitation bubbles including stable and unstable bubbles, the bubble generating part including a container having an inlet line through which the cleaning solution enters the bubble generating part and an outlet line through which the cleaning solution passes; a cleaning part configured to receive the cleaning solution including at least some of the stable bubbles from the outlet line, the cleaning part further configured to clean an object using the cleaning solution including the at least some of the stable bubbles; and a loading part configured to support the object in the cleaning part, wherein the outlet line of the container extends to an inner part of the cleaning part, and has a length and a diameter such that among the stable and unstable bubbles generated by the bubble generating part, the stable bubbles are predominantly transferred to the inner part of the cleaning part through the outlet line, and the bubble generating part includes a first piezoelectric transducer, the first piezoelectric transducer configured to generate the microcavitation bubbles, and the cleaning part includes a second piezoelectric transducer, the second piezoelectric transducer configured to oscillate the stable bubbles.