LASER BEAM INTENSITY DISTRIBUTION MEASUREMENT DEVICE AND LASER BEAM INTENSITY DISTRIBUTION MEASUREMENT METHOD

摘要

[Problem] Provided is a laser beam intensity distribution measurement device with which the intensity distribution of a laser beam can be sufficiently measured even in the case of a laser beam in an oblique incidence state having an optical path that is deflected from the optical axis. [Solution] This laser beam L intensity distribution measurement device 100 is a device that measures the intensity distribution of a laser beam. A measurement part 130 is disposed so as to face the optical axis C of the laser beam and measures the intensity distribution of the laser beam which is shone on a detection region 131a. A first adjustment part (collimating part 120M) of an adjustment part collimates and propagates the laser beam. A second adjustment part (condenser part 120N) of the adjustment part is disposed downstream of the collimating part along the optical axis, and brings the laser beam close to the optical axis and propagates the laser beam. The adjustment part adjusts the angle formed between the laser beam and the optical axis to be relatively small so as to propagate, toward the detection region, the laser beam which is deflected from the optical axis and propagated.