| 摘要 |
This laser device may be provided with: an oscillator that outputs laser light and includes a first laser chamber, a first pair of discharge electrodes disposed in the first laser chamber, and an optical resonator; a first amplifier that amplifies and outputs the laser light, and includes a second laser chamber disposed on a light path of the laser light outputted by the oscillator, and a second pair of discharge electrodes disposed at a first gap interval within the second laser chamber; and a first beam adjusting optical system that is disposed on the light path between the oscillator and the first amplifier, and adjusts the laser light outputted by the oscillator so that the beam width, in the electric discharge direction of the second pair of discharge electrodes, of the laser light entering the first amplifier becomes substantially the same as the first gap interval of the second pair of discharge electrodes. |
